Title :
3D integration: Advantages, enabling technologies & applications
Author :
Sadaka, Mariam ; Radu, Ionut ; Di Cioccio, Lea
Author_Institution :
Soitec USA Inc., Austin, TX, USA
Abstract :
The microelectronic industry has arrived at a crossroads. There is the challenge of continued Moore´s Law scaling and the ever-growing consumer demand for smaller, faster electronics with extended and new functionalities. 3D integration is a promising and fast-growing field that addresses the convergence of Moore´s Law and more than Moore. 3D integration offers a path for higher performance, higher density, higher functionality, smaller form factor, and potential cost reduction. Through this emerging field, new and improved technologies and integration schemes will be necessary to meet the associated manufacturing challenges; this paper describes the advantages of 3D integration, enabling technologies & the driver applications.
Keywords :
integrated circuit manufacture; integrated circuit technology; 3D integration; Moore´s Law scaling; microelectronic industry; Chemical technology; Copper; Delay; Dielectrics; Integrated circuit interconnections; Moore´s Law; Multicore processing; Stacking; Through-silicon vias; Wafer bonding; 3D Integration; 3D advantages; 3D applications; 3D enabling technology;
Conference_Titel :
IC Design and Technology (ICICDT), 2010 IEEE International Conference on
Conference_Location :
Grenoble
Print_ISBN :
978-1-4244-5773-1
DOI :
10.1109/ICICDT.2010.5510283