DocumentCode
3031015
Title
Vibration Sensor with Floating Gate Based on Standard CMOS Process
Author
Ting Yu ; Benxian Peng ; Fengqi Yu
Author_Institution
Dept. of Integrated Electron., Shenzhen Inst. of Adv. Technol., Shenzhen, China
fYear
2013
fDate
29-30 June 2013
Firstpage
1643
Lastpage
1646
Abstract
A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%.
Keywords
CMOS integrated circuits; MOSFET; microsensors; vibration measurement; floating gate; metal sacrificial layer; monolithic circuit integration; postCMOS process; standard CMOS process; vibration membrane; vibration sensor; Automation; Manufacturing; CMOS; floating gate; vibration sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Digital Manufacturing and Automation (ICDMA), 2013 Fourth International Conference on
Conference_Location
Qingdao
Type
conf
DOI
10.1109/ICDMA.2013.394
Filename
6598318
Link To Document