Title :
Design of linear motor driving system for Nano-positioning stage
Author :
Shuyuan Ma ; Hu Xie ; Wenbin Li ; Zhenning Sun
Author_Institution :
Sch. of Mech. Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
Considering the demands of driving the plane coil linear motor in Nano-positioning stage, a motor driver with small size and high-power was designed. To improve the accuracy of motor phase current detection, FIR filter and Cerebellar Model Articulation Controller (CMAC) neural network were adopted to reduce high-frequency noise and compensate the non-linear error of current sensor. The feasibility of the drive circuit and the validity of the filter and compensator were verified by experiments.
Keywords :
FIR filters; cerebellar model arithmetic computers; error compensation; linear motors; linear systems; motor drives; nanopositioning; neurocontrollers; nonlinear control systems; CMAC neural network; FIR filter; cerebellar model articulation controller neural network; drive circuit; motor phase current detection; nanopositioning stage; plane coil linear motor driving system design; sensor nonlinear error compensation; Coils; Error compensation; Finite impulse response filters; Noise; Permanent magnet motors; Pulse width modulation; Synchronous motors; DRV8332; FIR; SISO-CMAC; error compensation; linear motor;
Conference_Titel :
Mechatronic Sciences, Electric Engineering and Computer (MEC), Proceedings 2013 International Conference on
Conference_Location :
Shengyang
Print_ISBN :
978-1-4799-2564-3
DOI :
10.1109/MEC.2013.6885627
