Micromachined acoustic Fabry-Perot system for distance measurement

Author

Hornung, M. ; Brand, O. ; Paul, O. ; Baltes, H. ; Kuratli, C. ; Huang, Q.

Author_Institution

Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

1998

fDate

25-29 Jan 1998

Firstpage

643

Lastpage

648

Abstract

We report on a packaged miniaturized ultrasound based distance measurement system. The measurement principle is based on acoustic resonances between object and sensor, similar to the Fabry-Perot principle known in optics. The sensor system consists of two micromachined membrane resonators acting as ultrasound transmitter and receiver. The proximity sensor can measure distances in air in the range of 1 to 10 cm with an accuracy better than 0.8 mm

Keywords

CMOS integrated circuits; Fabry-Perot resonators; acoustic resonance; distance measurement; finite element analysis; micromechanical resonators; packaging; ultrasonic applications; ultrasonic transducers; US distance measurement; US receiver; US transmitter; acoustic resonances; micromachined acoustic Fabry-Perot system; micromachined membrane resonators; proximity sensor; Acoustic measurements; Acoustic sensors; Distance measurement; Fabry-Perot; Optical receivers; Optical resonators; Optical sensors; Optical transmitters; Ultrasonic imaging; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659833

Filename

659833