Title :
Micromachined acoustic Fabry-Perot system for distance measurement
Author :
Hornung, M. ; Brand, O. ; Paul, O. ; Baltes, H. ; Kuratli, C. ; Huang, Q.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
We report on a packaged miniaturized ultrasound based distance measurement system. The measurement principle is based on acoustic resonances between object and sensor, similar to the Fabry-Perot principle known in optics. The sensor system consists of two micromachined membrane resonators acting as ultrasound transmitter and receiver. The proximity sensor can measure distances in air in the range of 1 to 10 cm with an accuracy better than 0.8 mm
Keywords :
CMOS integrated circuits; Fabry-Perot resonators; acoustic resonance; distance measurement; finite element analysis; micromechanical resonators; packaging; ultrasonic applications; ultrasonic transducers; US distance measurement; US receiver; US transmitter; acoustic resonances; micromachined acoustic Fabry-Perot system; micromachined membrane resonators; proximity sensor; Acoustic measurements; Acoustic sensors; Distance measurement; Fabry-Perot; Optical receivers; Optical resonators; Optical sensors; Optical transmitters; Ultrasonic imaging; Ultrasonic variables measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659833
