Title :
Design and Analysis of MEMS Cantilever Based Binary Logic Inverter
Author :
Chakraborty, Subha ; Chaudhuri, Ashesh Ray ; Bhattacharyya, Tarun Kanti
Author_Institution :
Dept. of Electron. & Electr. Eng., Indian Inst. of Technol., Kharagpur, India
Abstract :
This paper presents the design, simulation and analysis of a digital logic inverter implemented with MEMS surface micromachining process. A detailed account of the design and analysis has been presented. Transient analysis has been performed for dynamic response of the device and inverter property has been verified.
Keywords :
cantilevers; logic gates; micromachining; micromechanical devices; MEMS cantilever; MEMS surface micromachining process; binary logic inverter; digital logic inverter; Electrodes; Fabrication; Logic devices; Logic gates; Microelectromechanical devices; Micromachining; Micromechanical devices; Pulse inverters; Structural beams; Voltage; MEMS; Pull-in; cantilever; digital; inverter;
Conference_Titel :
Advances in Computing, Control, & Telecommunication Technologies, 2009. ACT '09. International Conference on
Conference_Location :
Trivandrum, Kerala
Print_ISBN :
978-1-4244-5321-4
Electronic_ISBN :
978-0-7695-3915-7
DOI :
10.1109/ACT.2009.54
