• DocumentCode
    3031403
  • Title

    Panel: subwavelength lithography: how will it affect your design flow?

  • Author

    Sharan, Aditi ; Lippincott, S. ; Kahng, Andrew

  • Author_Institution
    Numerical Technologies, Inc.
  • fYear
    1999
  • fDate
    25-25 June 1999
  • Firstpage
    798
  • Lastpage
    798
  • Keywords
    Costs; Electronic design automation and methodology; Geometry; Integrated circuit layout; Lithography; Manufacturing processes; Optical distortion; Process design; Shape; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference, 1999. Proceedings. 36th
  • Conference_Location
    New Orleans, LA, USA
  • Print_ISBN
    1-58113-092-9
  • Type

    conf

  • DOI
    10.1109/DAC.1999.782135
  • Filename
    782135
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3031403