Title :
Tunable acoustic absorbing system using a deep hole array
Author :
Konishi, Satoshi ; Yoda, Mitsuhiro ; Hosaka, Naohiro ; Sugiyama, Susumu ; Akishita, Sadao
Author_Institution :
Fac. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan
Abstract :
We present a tunable acoustic absorbing system. Most of the conventional acoustic absorbers can absorb an only sound of a fixed frequency. We propose an acoustic absorbing system with a tunable compliance in order to absorb variable sounds. The developed system forms an array of the Helmholtz resonator with a deep hole array by a X-ray lithography. Micro deep holes are effective at a low frequency. The resonator has an air cavity whose volume is controllable so as to tune its resonant frequency to a desired frequency. This paper reports characteristics of our developed acoustic absorbing system and our project status
Keywords :
X-ray lithography; acoustic materials; acoustic transducers; closed loop systems; microactuators; micromachining; micromechanical resonators; tuning; Helmholtz resonator; X-ray lithography; acoustic absorbing system; deep hole array; tunable acoustic absorbing system; tunable compliance; Absorption; Acoustic arrays; Acoustic devices; Acoustic noise; Acoustical engineering; Insulation; Neck; Resonant frequency; Tunable circuits and devices; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659835