Title :
Design and fabrication of cost-effective side-stem micromechanical disk resonator with large capacitive gap
Author :
Phamvan, Huan ; Jongwon Seok ; Hae-Jin Choi
Author_Institution :
Sch. of Mech. Eng., Chung-Ang Univ., Seoul, South Korea
Abstract :
A high-performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost-effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 μm. The designed disk resonator operates in an elliptic contour-mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.
Keywords :
Q-factor; biosensors; micromechanical resonators; Q-factor; ambient air condition; capacitive gap; cost-effective fabrication; elliptic contour-mode; frequency 5.971 MHz; mass detection biosensors; quality factor; resonance frequency; side-stem micromechanical disk resonator; vacuum environment;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2014.0665