DocumentCode :
30321
Title :
Design and fabrication of cost-effective side-stem micromechanical disk resonator with large capacitive gap
Author :
Phamvan, Huan ; Jongwon Seok ; Hae-Jin Choi
Author_Institution :
Sch. of Mech. Eng., Chung-Ang Univ., Seoul, South Korea
Volume :
50
Issue :
10
fYear :
2014
fDate :
May 8 2014
Firstpage :
764
Lastpage :
766
Abstract :
A high-performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost-effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 μm. The designed disk resonator operates in an elliptic contour-mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.
Keywords :
Q-factor; biosensors; micromechanical resonators; Q-factor; ambient air condition; capacitive gap; cost-effective fabrication; elliptic contour-mode; frequency 5.971 MHz; mass detection biosensors; quality factor; resonance frequency; side-stem micromechanical disk resonator; vacuum environment;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2014.0665
Filename :
6824060
Link To Document :
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