Title :
Study of Porous Alumina Porosity after Pore Widening Process
Author :
Vojkuvka, L. ; Marsal, L.F. ; Pallares, J.
Author_Institution :
Univ. Rovira i Virgili, Tarragona
fDate :
Jan. 31 2007-Feb. 2 2007
Abstract :
The porosity study of self-ordered porous alumina membranes (PAMs) after pore widening process is described. The PAMs were fabricated using aluminum foils oxidized in oxalic acid via a two step anodization process. The as-produced PAMs samples were subsequently etched in phosphoric acid solution to widen the pores. The morphology of several samples with modified pores was examined using scanning electron microscopy (SEM) and then the SEM images were analyzed in order to calculate the porosity of the PAMs. The porous alumina membranes with tunable geometrical properties can be applied in the fabrication of nanostructures.
Keywords :
alumina; anodisation; etching; foils; membranes; nanostructured materials; organic compounds; oxidation; porosity; porous materials; scanning electron microscopy; self-assembly; Al2O3; SEM; aluminum foils oxidation; etching; nanostructures fabrication; oxalic acid; phosphoric acid solution; pore widening process; porous alumina porosity calculation; sample morphology; scanning electron microscopy; self-ordered porous alumina membranes; tunable geometrical properties; two step anodization process; Aluminum; Biomembranes; Etching; Fabrication; Nanostructures; Rough surfaces; Scanning electron microscopy; Surface morphology; Surface roughness; Temperature; Porous alumina membranes; pore widening; porosity;
Conference_Titel :
Electron Devices, 2007 Spanish Conference on
Conference_Location :
Madrid
Print_ISBN :
1-4244-0868-7
DOI :
10.1109/SCED.2007.383991
