Iterative maps for the nonlinear Pulsed Digital Oscillator for MEMS

Author

Ricart, J. ; Pons, J. ; Domìnguez, M.

Author_Institution

Univ. Politecnica de Catalunya, Barcelona

fYear

2007

fDate

Jan. 31 2007-Feb. 2 2007

Firstpage

72

Lastpage

75

Abstract

The Pulsed Digital Oscillator (PDO) is a sigma- delta based structure that has been proposed as a control circuit for several applications based on MEMS. A generic PDO is a sampled system that includes a MEMS resonator plus a comparator and a digital feedback loop providing the force pulses that actuate the MEMS device [2]. The most typical PDO topologies include simple and double feedback loops. This paper presents a comparison between both topologies by using the iterative maps as a new tool to analyze the nonlinearity effects on the dynamic behavior of the oscillator. To this effect, discrete-time simulation results of different PDO structures under different damping conditions are presented and analyzed.

Keywords

comparators (circuits); iterative methods; micromechanical resonators; oscillators; MEMS resonator; comparator; control circuit; digital feedback loop; discrete time simulation results; iterative maps; nonlinear pulsed digital oscillator; Damping; Delay; Feedback loop; Force feedback; Frequency; Microelectromechanical devices; Micromechanical devices; Oscillators; Sampling methods; Topology; Iterative Maps; MEMS; Oscillator; fractal;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2007 Spanish Conference on

Conference_Location

Madrid

Print_ISBN

1-4244-0868-7

Type

conf

DOI

10.1109/SCED.2007.383957

Filename

4271171