Non linear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches

Author

Lázaro, A. ; Girbau, D. ; Pradell, L. ; Nebot, A.

Author_Institution

Univ. Rovira i Virgili, Tarragona

fYear

2007

fDate

Jan. 31 2007-Feb. 2 2007

Firstpage

181

Lastpage

184

Abstract

In this work, a non linear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation can not be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss-Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation.

Keywords

electrostatic actuators; finite difference methods; iterative methods; microswitches; Gauss-Seidel relaxation iteration scheme; equilibrium equation; finite-difference discretization; fringing field; lateral electrostatically-actuated DC-contact; non linear actuation model; series MEMS switch; Communication switching; Contacts; Coplanar waveguides; Micromechanical devices; Microswitches; Predictive models; Radio frequency; Radiofrequency microelectromechanical systems; Semiconductor device modeling; Switches; Interdigital; MEMS; electrostatic actuation; in-plane switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2007 Spanish Conference on

Conference_Location

Madrid

Print_ISBN

1-4244-0868-7

Type

conf

DOI

10.1109/SCED.2007.384022

Filename

4271199