Title :
Non linear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches
Author :
Lázaro, A. ; Girbau, D. ; Pradell, L. ; Nebot, A.
Author_Institution :
Univ. Rovira i Virgili, Tarragona
fDate :
Jan. 31 2007-Feb. 2 2007
Abstract :
In this work, a non linear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation can not be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss-Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation.
Keywords :
electrostatic actuators; finite difference methods; iterative methods; microswitches; Gauss-Seidel relaxation iteration scheme; equilibrium equation; finite-difference discretization; fringing field; lateral electrostatically-actuated DC-contact; non linear actuation model; series MEMS switch; Communication switching; Contacts; Coplanar waveguides; Micromechanical devices; Microswitches; Predictive models; Radio frequency; Radiofrequency microelectromechanical systems; Semiconductor device modeling; Switches; Interdigital; MEMS; electrostatic actuation; in-plane switch;
Conference_Titel :
Electron Devices, 2007 Spanish Conference on
Conference_Location :
Madrid
Print_ISBN :
1-4244-0868-7
DOI :
10.1109/SCED.2007.384022
