Title :
μ-Porous silicon (μPS) gas sensor based on interdigitated μ-electrodes (IDμE´s)
Author :
Valera, Enrique ; Casals, Olga ; Vetter, Michael ; Rodríguez, Ángel
Author_Institution :
Univ. Politecnica de Catalunya, Barcelona
fDate :
Jan. 31 2007-Feb. 2 2007
Abstract :
A μ-porous silicon (μPS) gas sensor based on interdigitated μ-electrodes (IDμE´s) has been designed and developed. μPS obtained by means of electrochemical anodization of a p-type silicon (c-Si) wafer was used as active layer. The μPS layers are supported by the bulk of the c-Si wafer. Interdigitated μ-electrodes, which work as transducers, were deposited on the μPS surface by means of gold evaporation using shadow mask technique. Different IDμE´s, with different geometries and dimensions have been deposited. Additionally, different conditions of μPS formation, as i.e. electrolyte concentration, current density and anodization time, were used in order to obtain different actives layers with different absorption capabilities. Clear responses to organic vapors such us ethanol have been obtained.
Keywords :
anodisation; electrochemical electrodes; electrolytes; elemental semiconductors; gas sensors; gold; masks; organic compounds; porous semiconductors; silicon; Au; Si; current density; electrochemical anodization; electrolyte concentration; ethanol; gold evaporation; interdigitated μ-electrodes; organic vapors; porous silicon gas sensor; shadow mask technique; silicon wafer; Absorption; Ethanol; Fabrication; Gas detectors; Optical sensors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal sensors; Uninterruptible power systems; μ-porous silicon; Gas sensors; interdigitated μ-electrodes;
Conference_Titel :
Electron Devices, 2007 Spanish Conference on
Conference_Location :
Madrid
Print_ISBN :
1-4244-0868-7
DOI :
10.1109/SCED.2007.384026
