Title :
Silicon μ-preconcentrator for improved gas detection
Author :
Ivanov, Pavel ; Blanco, F. ; Gracia, I. ; Sabaté, N. ; Ruiz, A. ; Vilanova, X. ; Correig, X. ; Fonseca, L. ; Figueras, E. ; Santander, J. ; Cané, C.
Author_Institution :
Nat. Centre of Microelectron.-CSIC, Bellaterra
fDate :
Jan. 31 2007-Feb. 2 2007
Abstract :
In this study we present a μ-preconcentrator unit fabricated with silicon technology. The unit consists of a 3D-microheater surrounded by an insulating membrane. The preconcentrator is made up of a grid of suspended silicon bars underneath a polysilicon resistor. The grid was formed by 40 μm-wide, 520 μm-depth, 3000 μm-long silicon bars fabricated by deep reactive ion etching covering a 3 x 3 mm2 area. This type of silicon grid structure allows holding large amount of absorbent materials and provides efficient heat diffusion.
Keywords :
gas sensors; insulating materials; membranes; resistors; silicon; sputter etching; thermal diffusion; 3D-microheater; MHP gas sensors; Si; absorbent materials; deep reactive ion etching; gas detection; heat diffusion; insulating membrane; polysilicon resistor; silicon μ-preconcentrator; silicon grid structure; suspended silicon bars; Air pollution; Bars; Biomembranes; Bonding; Fabrication; Gas detectors; Gases; Heating; Resistors; Silicon; MHP gas sensors; active carbon; gas detection; silicon preconcentrator;
Conference_Titel :
Electron Devices, 2007 Spanish Conference on
Conference_Location :
Madrid
Print_ISBN :
1-4244-0868-7
DOI :
10.1109/SCED.2007.384031
