DocumentCode :
3033684
Title :
Photonic sensors based on integrated reflectivity, ellipsometry and spectrometry measurements in submicron size geometries
Author :
Casquel, R. ; Holgado, M. ; Molpeceres, C. ; Morales, M. ; Ocana, J.L.
Author_Institution :
Univ. Politecnica de Madrid, Madrid
fYear :
2007
fDate :
Jan. 31 2007-Feb. 2 2007
Firstpage :
336
Lastpage :
339
Abstract :
We have developed micro-nano structures as photonic sensors based on the observation of external reflectivity profiles. Spectra interference patterns as a function of the angle of incidence for both s and p polarizations directions as well as a phase shift between s and p polarisation are obtained. Also the reflectivity of the photonic structures is calculated and analyzed over a wide range of wavelengths of light as well. The sub-micro holes of the photonic structure have been evaluated with several refractive indices. As a result, the change in the effective refractive index involved by the optical liquids produces variations in the phase shift and the interference reflectivity patterns, making the system suitable for chemical, biochemical and pharmaceutical applications. The theoretical results of the integrated reflectivity, ellipsometry and spectrometry measurements ensure sensitive, accurate and reliable optical sensing detection.
Keywords :
ellipsometry; optical sensors; reflectivity; refractive index; angle of incidence; ellipsometry; external reflectivity profiles; integrated reflectivity; micro-nano structures; optical liquids; optical sensing detection; phase shift; photonic sensors; photonic structures; refractive indices; spectra interference patterns; spectrometry measurements; submicron size geometry; Ellipsometry; Geometry; Interference; Optical polarization; Optical refraction; Optical sensors; Optoelectronic and photonic sensors; Reflectivity; Size measurement; Spectroscopy; Sub-micro-holes; ellipsometry; refractive index sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices, 2007 Spanish Conference on
Conference_Location :
Madrid
Print_ISBN :
1-4244-0868-7
Type :
conf
DOI :
10.1109/SCED.2007.384062
Filename :
4271240
Link To Document :
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