Boron as a primary source of radiation in high density DRAMs

The interaction of cosmic ray thermal neutrons and boron is demonstrated as the primary source of radiation in devices containing borophosphosilicate glass (BPSG). Simulations indicated that this source of radiation generates enough charge to induce soft errors in memory devices. The results of a study of DRAM devices also demonstrated that this radiation is capable of inducing soft errors. A simple process change that significantly reduces this source of radiation is proposed.