A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly

Author

Rabenorosoa, Kanty ; Clévy, Cédric ; Lutz, Philippe ; Bargiel, Sylwester ; Gorecki, Christophe

Author_Institution

Autom. Control & Micro-Mechatron. Syst. depart.(AS2M Dept.), UTBM, Besancon, France

fYear

2009

fDate

17-20 Nov. 2009

Firstpage

95

Lastpage

100

Abstract

Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. The increasing needs of MOEMS (micro-opto-electro- mechanical systems) for the microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. The designed parts of RFS-MOB are assembled by using the developed micro-assembly station. Experimental results are shown and validate the effectiveness of the micro-assembly station and the micro-assembly strategies.

Keywords

micro-optomechanical devices; microassembling; 3D microassembly station; 3D reconfigurable hybrid MOEMS assembly; microassembly strategy; microopto-electro-mechanical systems; microsystem technology; nanotechnology; reconfigurable free space microoptical benches; Assembly systems; Geometrical optics; Grippers; Microassembly; Optical devices; Optical sensors; Rails; Space stations; Space technology; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Assembly and Manufacturing, 2009. ISAM 2009. IEEE International Symposium on

Conference_Location

Suwon

Print_ISBN

978-1-4244-4627-8

Electronic_ISBN

978-1-4244-4628-5

Type

conf

DOI

10.1109/ISAM.2009.5376922

Filename

5376922