Title :
A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly
Author :
Rabenorosoa, Kanty ; Clévy, Cédric ; Lutz, Philippe ; Bargiel, Sylwester ; Gorecki, Christophe
Author_Institution :
Autom. Control & Micro-Mechatron. Syst. depart.(AS2M Dept.), UTBM, Besancon, France
Abstract :
Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. The increasing needs of MOEMS (micro-opto-electro- mechanical systems) for the microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. The designed parts of RFS-MOB are assembled by using the developed micro-assembly station. Experimental results are shown and validate the effectiveness of the micro-assembly station and the micro-assembly strategies.
Keywords :
micro-optomechanical devices; microassembling; 3D microassembly station; 3D reconfigurable hybrid MOEMS assembly; microassembly strategy; microopto-electro-mechanical systems; microsystem technology; nanotechnology; reconfigurable free space microoptical benches; Assembly systems; Geometrical optics; Grippers; Microassembly; Optical devices; Optical sensors; Rails; Space stations; Space technology; Ultrafast optics;
Conference_Titel :
Assembly and Manufacturing, 2009. ISAM 2009. IEEE International Symposium on
Conference_Location :
Suwon
Print_ISBN :
978-1-4244-4627-8
Electronic_ISBN :
978-1-4244-4628-5
DOI :
10.1109/ISAM.2009.5376922
