Title :
Electrical properties of co-fired high and low dielectric constant multilayer package materials
Author :
Megherhi, Mohammed H. ; Dougherty, Joseph P. ; Dayton, Gordon O. ; Newnham, Robert E.
Author_Institution :
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
Abstract :
The problems encountered in mixing high-dielectric-constant (high- K) lead-oxide-based capacitor layers in the same body as low-dielectric-permittivity (low-K) signal distribution layers were studied. Compatibility between the high-K capacitor material and low-fire (850-950°C) glass-Al2O3 substrates was investigated. Most high-K ceramic materials sinter at temperatures above 1000°C; firing at 900°C or lower can result in a porous structure with poor electrical properties
Keywords :
capacitors; ceramics; packaging; permittivity; sintering; substrates; 850 to 950 degC; Al2O3; PbO; capacitor layers; ceramic materials; co-fired high dielectric constant materials; electrical properties; firing; glass-Al2O3 substrates; high-K capacitor material; low dielectric constant multilayer package materials; signal distribution layers; sintering; Capacitors; Ceramics; Dielectric materials; Dielectric substrates; High K dielectric materials; High-K gate dielectrics; Nonhomogeneous media; Packaging; Permittivity; Temperature;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200194
