Lead titanate thin films for piezoelectric applications

Author

Takeuchi, Hiroshi ; Kushida, Keiko

Author_Institution

Hitachi Ltd., Tokyo, Japan

fYear

1990

fDate

6-8 Jun 1990

Firstpage

115

Lastpage

120

Abstract

C-axis-oriented pure PbTiO₃ thin films were investigated for piezoelectric applications. Piezoelectric and ferroelectric properties of RF-sputtered PbTiO₃ films epitaxially grown on a SrTiO₂ single-crystal substrate are reviewed. The c-axis-oriented PbTiO₃ films were shown to be applicable to high-frequency ultrasonic devices in a composite vibrator form combined with a nonpiezoelectric substrate such as Si. A promising method for fabricating c-axis-oriented PbTiO ₃ films on an electroded Si(100) substrate, using the graphoepitaxy technique, is presented

Keywords

epitaxial layers; ferroelectric thin films; lead compounds; piezoelectric devices; sputtered coatings; ultrasonic devices; vibrations; PbTiO₃-Si; PbTiO₃-SrTiO₂; RF sputtered epitaxial films; Si; SrTiO₂; composite vibrator; ferroelectric properties; graphoepitaxy technique; high-frequency ultrasonic devices; nonpiezoelectric substrate; piezoelectric applications; thin films; Acoustic devices; Ferroelectric films; Ferroelectric materials; Lattices; Lead; Piezoelectric films; Semiconductor films; Sputtering; Substrates; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on

Conference_Location

Urbana-Champaign, IL

Print_ISBN

0-7803-0190-0

Type

conf

DOI

10.1109/ISAF.1990.200207

Filename

200207