Title :
Lead titanate thin films for piezoelectric applications
Author :
Takeuchi, Hiroshi ; Kushida, Keiko
Author_Institution :
Hitachi Ltd., Tokyo, Japan
Abstract :
C-axis-oriented pure PbTiO3 thin films were investigated for piezoelectric applications. Piezoelectric and ferroelectric properties of RF-sputtered PbTiO3 films epitaxially grown on a SrTiO2 single-crystal substrate are reviewed. The c-axis-oriented PbTiO3 films were shown to be applicable to high-frequency ultrasonic devices in a composite vibrator form combined with a nonpiezoelectric substrate such as Si. A promising method for fabricating c-axis-oriented PbTiO 3 films on an electroded Si(100) substrate, using the graphoepitaxy technique, is presented
Keywords :
epitaxial layers; ferroelectric thin films; lead compounds; piezoelectric devices; sputtered coatings; ultrasonic devices; vibrations; PbTiO3-Si; PbTiO3-SrTiO2; RF sputtered epitaxial films; Si; SrTiO2; composite vibrator; ferroelectric properties; graphoepitaxy technique; high-frequency ultrasonic devices; nonpiezoelectric substrate; piezoelectric applications; thin films; Acoustic devices; Ferroelectric films; Ferroelectric materials; Lattices; Lead; Piezoelectric films; Semiconductor films; Sputtering; Substrates; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200207
