DocumentCode
3035825
Title
Automatic fabrication system for plastic microfluidic chips
Author
Xiaodong, Wang ; Liding, Wang ; Chong, Liu ; Liqun, Ma ; Yi, Luo
Author_Institution
Res. Center for Micro Syst. Technol., Dalian Univ. of Technol., China
fYear
2004
fDate
31 Oct.-3 Nov. 2004
Firstpage
331
Lastpage
336
Abstract
An automatic fabrication system for batch production of plastic microfluidic chips was developed. The fabricated chips can be used for capillary electrophoresis analysis. The processing technique of chip fabrication mainly includes three steps: microchannel fabrication using hot-embossing technique, precise alignment of the chip´s substrate and cover, thermal bonding of the substrate and the cover. Hot-embossing machine, automatic aligning equipment for transparent substrates and thermal bonding machine were developed according to the processing technique. The automatic fabrication system and its constitutional equipments, the embedded processing techniques and auxiliary functions are described and explained in the paper. The auxiliary functions, such as automatic de-embossing and pre-joining of the plastic substrate and cover, are realized for fully automatic fabrication.
Keywords
bonding processes; microfluidics; automatic aligning equipment; automatic fabrication system; capillary electrophoresis analysis; hot-embossing technique; microchannel fabrication; plastic microfluidic chips; thermal bonding; Bonding; Chemical analysis; Chip scale packaging; Costs; Fabrication; Glass; Microfluidics; Plastics; Semiconductor materials; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on
Print_ISBN
0-7803-8607-8
Type
conf
DOI
10.1109/MHS.2004.1421270
Filename
1421270
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