Title :
Automatic fabrication system for plastic microfluidic chips
Author :
Xiaodong, Wang ; Liding, Wang ; Chong, Liu ; Liqun, Ma ; Yi, Luo
Author_Institution :
Res. Center for Micro Syst. Technol., Dalian Univ. of Technol., China
fDate :
31 Oct.-3 Nov. 2004
Abstract :
An automatic fabrication system for batch production of plastic microfluidic chips was developed. The fabricated chips can be used for capillary electrophoresis analysis. The processing technique of chip fabrication mainly includes three steps: microchannel fabrication using hot-embossing technique, precise alignment of the chip´s substrate and cover, thermal bonding of the substrate and the cover. Hot-embossing machine, automatic aligning equipment for transparent substrates and thermal bonding machine were developed according to the processing technique. The automatic fabrication system and its constitutional equipments, the embedded processing techniques and auxiliary functions are described and explained in the paper. The auxiliary functions, such as automatic de-embossing and pre-joining of the plastic substrate and cover, are realized for fully automatic fabrication.
Keywords :
bonding processes; microfluidics; automatic aligning equipment; automatic fabrication system; capillary electrophoresis analysis; hot-embossing technique; microchannel fabrication; plastic microfluidic chips; thermal bonding; Bonding; Chemical analysis; Chip scale packaging; Costs; Fabrication; Glass; Microfluidics; Plastics; Semiconductor materials; Substrates;
Conference_Titel :
Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on
Print_ISBN :
0-7803-8607-8
DOI :
10.1109/MHS.2004.1421270