Title :
A 1.4µm front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes
Author :
Watanabe, Hisashi ; Hirai, Jun ; Katsuno, Motonari ; Tachikawa, Keishi ; Tsuji, Sho ; Kataoka, Masao ; Kawagishi, Saori ; Kubo, Hiroko ; Yano, Hisashi ; Suzuki, Shigeru ; Okazaki, Gen ; Yamamoto, Kouichi ; Fujinaka, Hiroshi ; Fujioka, Takashi ; Suzuki, Ma
Author_Institution :
Semicond. Co., Panasonic Corp., Nagaokakyo, Japan
Abstract :
A frontside illuminated image (FSI) sensor with novel light guiding structures consisting of stacked lightpipes was developed using 45nm Cu processing on 300 mm wafers. We demonstrated a high quantum efficiency (QE) of 75% and maximum incident angle of 40°, which exceeds the performance of backside illuminated image (BSI) sensors [1,2,3].
Keywords :
copper; image sensors; BSI sensors; Cu; copper processing; efficiency 75 percent; front-side illuminated image sensor; high quantum efficiency; incident angle; light guiding structure; size 300 mm; size 45 nm; stacked lightpipes; wavelength 1.4 mum; Green products; Optical crosstalk; Optical filters; Optical imaging; Optical sensors; Optical variables control; Photodiodes;
Conference_Titel :
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4577-0506-9
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2011.6131513
