A dual axis thermal convective silicon gyroscope

Author

Shiozawa, Tatsuo ; Dau, V.T. ; Dao, Dzung Viet ; Kumagai, Hideo ; Sugiyama, Susumu

Author_Institution

Guidance & Navigation Sect., Tamagawa Seiki Co., Ltd., Japan

fYear

2004

fDate

31 Oct.-3 Nov. 2004

Firstpage

277

Lastpage

282

Abstract

This paper presents the design, simulation and fabrication of a semiconductor gas gyroscope. The proposed sensor can detect dual axis of angular rate. The gyroscope configuration consists of two main parts, the piezoelectric pump and the micro sensing part, which consists of four thermistor wires with dimension of 400 × 4 × 2 μm³, (length × width × thickness). Good agreement between the sensitivity simulation results and the experimental data has been realized. This gas gyroscope is expected to be applied in ship anti-rolling and stabilization systems.

Keywords

elemental semiconductors; gyroscopes; silicon; thermistors; 2 micron; 4 micron; 400 micron; Si; dual axis thermal convective silicon gyroscope; piezoelectric pump; semiconductor gas gyroscope; ship antirolling; stabilization systems; thermistor wires; Fabrication; Fluid flow; Fluid flow measurement; Gas detectors; Gyroscopes; Marine vehicles; Silicon; Thermal engineering; Thermistors; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on

Print_ISBN

0-7803-8607-8

Type

conf

DOI

10.1109/MHS.2004.1421318

Filename

1421318