DocumentCode :
3037437
Title :
Spectroscopic ellipsometry studies on ferroelectric surfaces
Author :
Trolier-McKinstry, S. ; Newnham, R.E. ; Vedam, K.
Author_Institution :
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
fYear :
1990
fDate :
6-8 Jun 1990
Firstpage :
650
Abstract :
Summary form only given. Spectroscopic ellipsometry offers a means through which it should be possible to nondestructively characterize both intrinsic and processing-induced surface layers throughout a proposed thickness regime. Measurements of the ellipticity and azimuth of the reflected light were made between 300 and 700 nm using a xenon source with a rotating analyzer ellipsometer. A large BaTiO3 crystal oriented with the optic axis perpendicular to the surface was polished in steps down to 0.05-μm grit. After poling to remove 90° domains, ellipsometric data were collected at four angles of incidence. Several models for the surface region were examined by fitting all data sets simultaneously. The best fit, chosen using a nonlinear regression analysis, was for a layer ~140 Å thick with a refractive index considerably below those shown by bulk BaTiO3
Keywords :
barium compounds; ellipsometry; ferroelectric materials; refractive index; 300 to 700 nm; BaTiO3 crystal; ferroelectric surfaces; nondestructive characterization; nonlinear regression analysis; poling; refractive index; spectroscopic ellipsometry; Azimuth; Ellipsometry; Ferroelectric materials; Nonlinear optics; Optical refraction; Optical variables control; Rotation measurement; Spectroscopy; Surface fitting; Xenon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
Type :
conf
DOI :
10.1109/ISAF.1990.200337
Filename :
200337
Link To Document :
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