• DocumentCode
    3037643
  • Title

    Ferroelectric layers made by thermal decomposition of organometallic compounds

  • Author

    Klee, M. ; Schnabel, P. ; Brand, W. ; Mauczok, R.

  • Author_Institution
    Philips GmbH Forschungslab. Aachen, Germany
  • fYear
    1990
  • fDate
    6-8 Jun 1990
  • Firstpage
    685
  • Lastpage
    688
  • Abstract
    The thermal decomposition of organometallic compounds was used to deposit ferroelectric (Pb,La)TiO3 and Pb(Ti,Zr)O3 films onto Pt and Si substrates by spin-coating and dip-coating techniques. Crystalline films with remanent polarizations of 8-11 μC/cm2 and coercive field strengths of 39-68 kV/cm were obtained
  • Keywords
    coating techniques; ferroelectric thin films; lanthanum compounds; lead compounds; pyrolysis; (PbLa)TiO3; PZT; PbZrO3TiO3; Pt substrates; Si substrates; coercive field strengths; crystalline films; dip-coating; ferroelectric; films; organometallic compounds; remanent polarizations; spin-coating; thermal decomposition; Crystallization; Ferroelectric films; Ferroelectric materials; Grain size; Optical films; Semiconductor films; Substrates; Thermal decomposition; X-ray diffraction; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
  • Conference_Location
    Urbana-Champaign, IL
  • Print_ISBN
    0-7803-0190-0
  • Type

    conf

  • DOI
    10.1109/ISAF.1990.200347
  • Filename
    200347