PZT thin films by laser ablation

Author

Lee, J. ; Ramkumar, K. ; Safari, A. ; Danforth, S.C. ; Neifeld, R. ; Pfeffer, R.L. ; Wrenn, C.

Author_Institution

Dept. of Ceramic Eng., Rutgers Univ., Piscataway, NJ, USA

fYear

1990

fDate

6-8 Jun 1990

Firstpage

722

Lastpage

725

Abstract

Lead zirconate titanate (PZT) thin films were deposited by laser ablation using both CO₂ and excimer lasers. The films were deposited in a vacuum as well as in an oxygen ambient, and the compositions were analyzed by Rutherford backscattering spectrometry and energy dispersive spectroscopy. It was found that the CO₂ laser which has a long pulselength yields films with excess Pb, whereas the excimer laser which has a characteristically shorter pulselength yields Pb deficient films

Keywords

Rutherford backscattering; X-ray chemical analysis; ferroelectric thin films; lead compounds; vacuum deposited coatings; CO₂ laser; O ambient; Pb deficient films; PbZrO₃TiO₃; RBS; Rutherford backscattering spectrometry; compositions; energy dispersive spectroscopy; excess Pb; excimer lasers; laser ablation; long pulselength; thin films; vacuum; Backscatter; Elementary particle vacuum; Laser ablation; Lead; Optical pulses; Pulsed laser deposition; Spectroscopy; Sputtering; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on

Conference_Location

Urbana-Champaign, IL

Print_ISBN

0-7803-0190-0

Type

conf

DOI

10.1109/ISAF.1990.200358

Filename

200358