• DocumentCode
    3037916
  • Title

    Channel optical waveguides of ZnO thin films

  • Author

    Kamauchi, M. ; Shiosaki, T. ; Kawabata, A.

  • Author_Institution
    Mitsubishi Cable Industries Ltd., Hyogo, Japan
  • fYear
    1990
  • fDate
    6-8 Jun 1990
  • Firstpage
    733
  • Lastpage
    736
  • Abstract
    Addressed are the waveguide properties of Ti-diffused and strip-loaded ZnO thin films and fabrication of channel optical waveguides. Channel optical waveguides of ZnO films were obtained by Ti diffusing and SiO2 loading, respectively. The optical loss of the SiO2-loaded waveguide was superior to that of the Ti-diffused waveguide. In the SiO2-loaded type, the theoretical values showed good agreement with experimental values
  • Keywords
    dielectric-loaded waveguides; optical films; optical losses; optical waveguides; silicon compounds; titanium; zinc compounds; SiO2 loading; SiO2-ZnO:Ti; Ti-diffused films; channel optical waveguides; fabrication; optical loss; strip-loaded ZnO thin films; waveguide properties; Annealing; Equations; Optical films; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Refractive index; Temperature dependence; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
  • Conference_Location
    Urbana-Champaign, IL
  • Print_ISBN
    0-7803-0190-0
  • Type

    conf

  • DOI
    10.1109/ISAF.1990.200361
  • Filename
    200361
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3037916