A CMOS compatible back end MEMS switch for logic functions

Author

Joshi, Vikram ; Khieu, Cong ; Smith, Charles G. ; Schepens, Cor ; Csaszar, Farkas ; Lacey, Damian ; Nagata, Toshi ; Renault, Mickael ; van Kampen, Rob ; Knipe, Richard ; Yost, Dennis

Author_Institution

Cavendish Kinetics Inc., San Jose, CA, USA

fYear

2010

fDate

6-9 June 2010

Firstpage

1

Lastpage

3

Abstract

In this paper we show that by shrinking MEMS switches to sub-micron thickness and a few microns in lateral dimension, they can be encapsulated in the dielectric spacer between the metallization of a back end CMOS process. By making zero restoring force rocker switches in addition to more traditional cantilever based switches we demonstrate that by coupling several switches together logic functions can be performed. We discuss how coupled MEMS switches could be used for logic and FPGA functions and show that these switches work up to 400°C.

Keywords

CMOS integrated circuits; field programmable gate arrays; metallisation; microswitches; CMOS compatible back end MEMS switch; FPGA function; cantilever based switches; dielectric spacer; logic function; metallization; submicron thickness; Adhesives; CMOS process; Electrodes; Logic devices; Logic functions; Metallization; Micromechanical devices; Microswitches; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Interconnect Technology Conference (IITC), 2010 International

Conference_Location

Burlingame, CA

Print_ISBN

978-1-4244-7676-3

Type

conf

DOI

10.1109/IITC.2010.5510694

Filename

5510694