Title :
Design, modeling and optimization of a multilayer diaphragm used in optical pressure sensor
Author :
Khosravi, Amin ; Khosravi, Mahdi ; Nozari, Parastoo
Author_Institution :
Dept. of Electron. Eng., Arak Azad Univ., Arak, Iran
Abstract :
Multilayer diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both optical sensor and common sensor. A simplified model is introduced to reduce the CPU time. Characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro.
Keywords :
diaphragms; finite element analysis; optical sensors; optimisation; pressure sensors; ANSYS implementation; APDL macro; CPU time reduction; finite element software; multilayer diaphragm; optical pressure sensor; optimization; Analytical models; Finite element methods; Micromechanical devices; Nonhomogeneous media; Numerical models; Optimization; Solids; ANSYS®; Finite Element; MEMS; Multilayer Diaphragm; optical Pressure Sensors;
Conference_Titel :
Computer Science and Automation Engineering (CSAE), 2012 IEEE International Conference on
Conference_Location :
Zhangjiajie
Print_ISBN :
978-1-4673-0088-9
DOI :
10.1109/CSAE.2012.6272989
