DocumentCode
3039101
Title
Fundamental origin of excellent low-noise property in 3D Si-MOSFETs ∼ Impact of charge-centroid in the channel due to quantum effect on 1/f noise ∼
Author
Feng, W. ; Hettiarachchi, R. ; Lee, Y. ; Sato, S. ; Kakushima, K. ; Sato, M. ; Fukuda, K. ; Niwa, M. ; Yamabe, K. ; Shiraishi, K. ; Iwai, H. ; Ohmori, K.
Author_Institution
Grad. Sch. of Pure & Appl. Sci., Univ. of Tsukuba, Tsukuba, Japan
fYear
2011
fDate
5-7 Dec. 2011
Abstract
We fabricated Si nanowire (NW) nFETs, and used them to experimentally demonstrate the superior noise properties of 3D MOSFETs. By carefully comparing the NWFETs with planar FETs, we found that it was critical to control the location of the centroid of the electron density in the inversion channel in order to obtain a noise spectral density with low magnitude. Self-consistent calculations of the Schrödinger and Poisson equations clearly reveal the advantages of NWFETs in electron distribution due to quantum confinement, specifically in the small gate-overdrive (Vg-Vt) condition. Moreover, by increasing Vd, the range where the NWFET exhibits superior noise properties to a planar FET can be extended to larger Vg-Vt because the effective Vg near the drain is reduced.
Keywords
1/f noise; MOSFET; Poisson equation; Schrodinger equation; electron density; elemental semiconductors; nanowires; semiconductor device noise; semiconductor quantum wires; silicon; 1/f noise; 3D Si-MOSFET; Poisson equations; Schrodinger equations; Si; Si nanowire nFET; charge centroid; electron density; electron distribution; inversion channel; low noise property; noise spectral density; planar FET; quantum confinement; quantum effect; small gate overdrive; superior noise properties; FETs; Fluctuations; Logic gates; Noise; Shape; Silicon; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
978-1-4577-0506-9
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2011.6131627
Filename
6131627
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