DocumentCode
3039430
Title
VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors
Author
Arcamone, J. ; Niel, A. ; Gouttenoire, V. ; Petitjean, M. ; David, N. ; Barattin, R. ; Matheron, M. ; Ricoul, F. ; Bordy, T. ; Blanc, H. ; Ruellan, J. ; Mercier, D. ; Pereira-Rodrigues, N. ; Costa, G. ; Agache, V. ; Hentz, S. ; Gabriel, JC ; Baleras, F. ;
Author_Institution
CEA-LETI, Grenoble, France
fYear
2011
fDate
5-7 Dec. 2011
Abstract
This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
Keywords
VLSI; chromatography; gas sensors; microfabrication; nanofabrication; nanosensors; silicon; NEMS detectors; NEMS resonators; VLSI silicon multigas analyzer coupling gas chromatography; microfabrication; nanoelectromechanical systems; nanofabrication; portable multigas analyzer; Detectors; Frequency measurement; Nanoelectromechanical systems; Noise; Noise measurement; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2011 IEEE International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
978-1-4577-0506-9
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2011.6131637
Filename
6131637
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