Highly reliable, complementary atom switch (CAS) with low programming voltage embedded in Cu BEOL for Nonvolatile Programmable Logic

A novel complementary atom switch (CAS) embedded in Cu BEOL has been developed to realize low programming voltage of 2V and extremely high disturbance reliability of OFF-state (T_0.1>;10 years at 1V, 125°C). The decrement of solid-electrolyte density successfully reduces the programming voltage down to 2V. Two bipolar resistive-change elements such as atom switches are connected in series with opposite direction, in which the two OFF-state elements complementarily divide the voltage stress, greatly enlarging the OFF-state lifetime. The highly reliable, complementary atom switch is a promising device for energy efficient, Nonvolatile Programmable Logic (NPL).