Laser micro-fabrication in RF MEMS switches

The RF MEMS Switch is the key element in the field of microwave and mm-wave signal control. In recent years it has been investigated widely because of its advantages of low insertion loss, low power consumption, high isolation, excellent compatibility with silicon and high linearity over PIN diode or FET counterpart. Meanwhile as the development of laser technology it has demonstrated extensively to be a very valuable tool for the development of high quality processes in micro-applications. The use of lasers in the field of MEMS is multiple. Starting from characterization, testing and going to technology and working principle of the microsystems and nanosystems, the lasers find applications in any of these areas. The paper overviews some of the laser micro fabrication in RF MEMS switches such as laser deposition, laser lithography, laser direct writing etc. We present the respective technologies, their working principles, their advantages and drawbacks. In some cases the examples of microstructures realized by using laser techniques have been showed.