Title : 
High efficiency radial-junction Si nanohole solar cells formed by self-assembling high aspect ratio plasma etching
         
        
            Author : 
Li, Hua-Min ; Lee, Dae-Yeong ; Lim, Yeong-Dae ; Yang, Cheng ; Zhang, Gang ; Kim, Hyunjin ; Cha, SeungNam ; Kim, Jong Min ; Yoo, Won Jong
         
        
            Author_Institution : 
Dept. of Nano Sci. & Technol., Sungkyunkwan Univ., Suwon, South Korea
         
        
        
        
            Abstract : 
A drastic improvement in conversion efficiency was achieved from Si solar cells with radial-junction nanohole structure of a high aspect ratio of ~10 which is fabricated by self-assembling plasma etching. A conversion efficiency of 27.8 % was predicted based on an optimization of various structural parameters by numerical simulations, and a design principle for realizing high efficiency Si nanohole surface texture for photovoltaic devices was demonstrated.
         
        
            Keywords : 
elemental semiconductors; nanofabrication; numerical analysis; optimisation; self-assembly; silicon; solar cells; sputter etching; surface texture; Si; conversion efficiency; high efficiency radial-junction nanohole solar cell; nanohole surface texture; numerical simulation; photovoltaic device; radial-junction nanohole structure; self-assembling high aspect ratio plasma etching; structural parameter optimization; Etching; Junctions; Neodymium; Periodic structures; Photovoltaic cells; Silicon;
         
        
        
        
            Conference_Titel : 
Electron Devices Meeting (IEDM), 2011 IEEE International
         
        
            Conference_Location : 
Washington, DC
         
        
        
            Print_ISBN : 
978-1-4577-0506-9
         
        
            Electronic_ISBN : 
0163-1918
         
        
        
            DOI : 
10.1109/IEDM.2011.6131684