An undergraduate microfabrication project laboratory case study: the micromechanical contactor array

Summary form only given. For approximately ten years, MIT has supported an undergraduate project laboratory which teaches microfabrication process design. The project laboratory attempts to engage the students in projects which have a end goal of fabrication of a specific novel device, often with an end user that is supporting the laboratory portion of the course. In this paper, we will present the most recent results of teaching this course in the Spring ´98 semester. The project this semester was to fabricate an array of micromechanical contactors which could be used in the high-speed testing of integrated circuits. We will describe the execution of the course in detail. A detailed description of the final device design and fabrication will be given with the measured results. We will summarize the lessons learned, particularly in relation to organizing a team of students on one project, and the nuances of working with an industrial sponsor in a course environment