DocumentCode :
3041382
Title :
Novel galvanic isolation based on spin valve GMR magnetic field sensors
Author :
Fayfield, Robert ; Hazelton, Tim ; Popple, Tony ; Williamson, Fred
Author_Institution :
Nonvolatile Electron. Inc., MN, USA
fYear :
1999
fDate :
1999
Firstpage :
165
Lastpage :
169
Abstract :
A novel technology for integrated galvanic signal isolation is presented. The new approach combines MEMS derived thick film metallization and polymer processing technology with spin valve giant magnetoresistive (GMR) materials on a silicon substrate to yield a tiny, high performance signal isolator. This isolator device represents a unit cell that can be fabricated in single or multiple channel versions and can be monolithically integrated with standard silicon ICs. This will allow the realization of high-level isolated interface functions in low cost, small footprint, low profile packages
Keywords :
integrated circuit metallisation; integrated circuit packaging; isolation technology; magnetic sensors; micromechanical devices; spin valves; MEMS; giant magnetoresistive materials; high performance signal isolator; integrated galvanic signal isolation; isolated interface functions; low cost packages; magnetic field sensors; multiple channel version; polymer processing technology; silicon substrate; single channel version; spin valve; thick film metallization; Galvanizing; Giant magnetoresistance; Isolation technology; Isolators; Magnetic fields; Magnetic materials; Micromechanical devices; Silicon; Spin valves; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-5240-8
Type :
conf
DOI :
10.1109/UGIM.1999.782846
Filename :
782846
Link To Document :
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