Title :
Application of statistical simulation to the modeling of IC process yields
Author :
Sanders, Thomas J. ; Means, Dale P. ; Hess, Glenn T.
Author_Institution :
Florida Inst. of Technol., Melbourne, FL, USA
Abstract :
This paper presents the results of an R&D program conducted jointly by a small business and a university. The goal of the program is to develop a new methodology for IC process and device simulation. The core of the methodology is a software program called STADIUM, which enables process and device engineers to include in their designs the effects of manufacturing variation on product yield. STADIUM is used to develop statistical information about integrated circuit parameters using a statistical technique called design of experiments. The results of the simulation can then be related to potential failure modes and to product yield. This paper describes the algorithms and user interface contained in the software
Keywords :
design of experiments; electronic engineering computing; failure analysis; integrated circuit modelling; integrated circuit reliability; integrated circuit yield; research initiatives; software packages; IC process simulation; IC process yields; R&D program; STADIUM; algorithms; design of experiments; device simulation; integrated circuit parameters; methodology; modeling; potential failure mode; product yield; small business; software program; statistical information; statistical simulation; university; user interface; Application specific integrated circuits; Circuit simulation; Contracts; Design engineering; Equations; Integrated circuit modeling; Integrated circuit yield; Manufacturing processes; Physics; Research and development;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-5240-8
DOI :
10.1109/UGIM.1999.782851
