DocumentCode
3041535
Title
The manufacture of CMOS integrated circuits in a university microelectronics laboratory
Author
Fuller, Lynn
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1999
fDate
1999
Firstpage
211
Lastpage
215
Abstract
The manufacture of CMOS integrated circuits in a university laboratory course is difficult because the process is complicated and time consuming. At RIT we have developed an approach that allows the manufacture of CMOS integrated circuits similar to manufacturing in a semiconductor factory. This allows the student to learn about semiconductor manufacturing in addition to fabrication technology for CMOS integrated circuits
Keywords
CMOS integrated circuits; integrated circuit manufacture; lithography; CMOS integrated circuits; laboratory techniques; lithography; semiconductor manufacturing; CMOS integrated circuits; CMOS technology; Integrated circuit manufacture; Integrated circuit technology; Laboratories; Manufacturing processes; Microelectronics; Production facilities; Semiconductor device manufacture; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location
Minneapolis, MN
Print_ISBN
0-7803-5240-8
Type
conf
DOI
10.1109/UGIM.1999.782855
Filename
782855
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