Abstract :
The following topics are dealt with: MEMS actuators; RF MEMS; fuel cell power MEMS; microfluidics; biological cells; NEMS; MEMS packaging; optical MEMS; bioMEMS; biomedical applications; biochemical sensors; flow sensors; and carbon nanotubes.
Keywords :
bioMEMS; biological techniques; carbon nanotubes; cellular biophysics; chemical sensors; flow sensors; fuel cells; micro-optomechanical devices; microactuators; microfluidics; nanoelectromechanical devices; packaging; power electronics; MEMS actuators; MEMS packaging; NEMS; RF MEMS; bioMEMS; biochemical sensors; biological cells; biomedical applications; carbon nanotubes; flow sensors; fuel cell power MEMS; microfluidics; optical MEMS;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805296
