Title :
Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components
Author :
Gaspar, J. ; Held, J. ; Pedrini, G. ; Osten, W. ; Paul, O.
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg
Abstract :
The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.
Keywords :
calibration; displacement measurement; electrostatic actuators; measurement by laser beam; silicon-on-insulator; speckle; stroboscopes; SOI; calibration; digital speckle interferometry; electrostatic actuation; in-plane displacements; in-plane microactuators; laser-deflection method; mechanical actuation; micromechanical components; optical measurement; stroboscopic illumination; Adaptive optics; Calibration; Displacement measurement; Electrostatic measurements; Measurement standards; Micromechanical devices; Optical devices; Optical interferometry; Production systems; Standards development;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805305
