Title :
3D Magnetic Microactuator Made of Newly Developed Magnetically Modified Photocurable Polymer and Application to Swimming Micromachine and Microscrewpump
Author :
Kobayashi, Kengo ; Ikuta, Koji
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya
Abstract :
This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw-type microactuators made of the polymer with a diameter of submillimeter order.
Keywords :
electromagnetic actuators; ferromagnetism; microactuators; polymers; stereolithography; 3D magnetic microactuator; ferromagnetic property; magnetic particles; magnetically modified photocurable polymer; microstereolithography; particle dispersion; screw-type microactuators; swimming micromachine; swimming microscrewpump; viscosity-increasing agent; Magnetic forces; Magnetic liquids; Magnetic materials; Magnetic particles; Magnetic properties; Microactuators; Micromagnetics; Microstructure; Photonic crystals; Polymers;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805306