DocumentCode
3042245
Title
A Novel Stress-Gradient-Robust Metal-Contact Switch
Author
Sedaghat-Pisheh, Hojr ; Kim, Jung-Mu ; Rebeiz, Gabriel M.
Author_Institution
Univ. of California, San Diego, CA
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
27
Lastpage
30
Abstract
This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS switch with low sensitivity to stress gradients and temperature variations. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and has excellent microwave performance to > 40 GHz.
Keywords
microswitches; circular geometry; fast switching time; metal-contact RF MEMS switch; Contacts; Force measurement; Frequency measurement; Mechanical variables measurement; Q measurement; Springs; Stress measurement; Switches; Thickness measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805310
Filename
4805310
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