Title :
Fabrication of Photonic Crystal Membranes in Chalcogenide Glasses by Focused Ion Beam Milling
Author :
Freeman, D. ; Madden, S. ; Luther-Davies, B.
Author_Institution :
Res. Sch. of Phys. Sci. & Eng., Australian Nat. Univ., Canberra, ACT
Abstract :
Free-standing films of AMTIR-1 chalcogenide glass were produced by ultra-fast pulsed laser deposition onto a substrate and subsequent float-off in water. A lattice of holes was then milled into the film using a focused ion beam (FlB). Optical measurements of Fano resonances indicate that the resulting structure has strongly modified guided modes, as expected for a photonic crystal
Keywords :
chalcogenide glasses; focused ion beam technology; milling; optical fabrication; optical glass; photonic crystals; pulsed laser deposition; Fano resonance; chalcogenide glass; focused ion beam milling; photonic crystal membrane fabrication; pulsed laser deposition; Biomembranes; Glass; Ion beams; Laser modes; Milling; Optical device fabrication; Optical films; Optical pulses; Photonic crystals; Pulsed laser deposition; Fano resonance; chalcogenide; focused ionbeam; glass; photonic crystal;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
0-7803-8820-8
DOI :
10.1109/COMMAD.2004.1577516
