• DocumentCode
    3042427
  • Title

    Porous Silicon Based Rugate Filters

  • Author

    Ilyas, S. ; Reece, P.J. ; Salvador, G.P. ; Booking, T. ; Gal, M.

  • Author_Institution
    Univ. of New South Wales, Sydney, NSW
  • fYear
    2004
  • fDate
    8-10 Dec. 2004
  • Firstpage
    169
  • Lastpage
    172
  • Abstract
    We report on the design and fabrication of porous silicon based rugate filters. We have achieved very narrow linewidth, high reflectivity optical filters made entirely from silicon by continuously varying of the refractive index of Si and apodizing the index profile of the structure
  • Keywords
    elemental semiconductors; optical design techniques; optical fabrication; optical filters; porous semiconductors; refractive index; silicon; Si; design; fabrication; index profile apodization; narrow linewidth; porous silicon; reflectivity; refractive index; rugate filters; Displays; Optical device fabrication; Optical films; Optical filters; Optical refraction; Optical sensors; Reflectivity; Refractive index; Silicon; Sputtering; optical filter; porous silicon; rugate filter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
  • Conference_Location
    Brisbane, Qld.
  • Print_ISBN
    0-7803-8820-8
  • Type

    conf

  • DOI
    10.1109/COMMAD.2004.1577519
  • Filename
    1577519
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3042427