A New Micro-Four-Point Probe Design for Various Applications

In this paper, we proposed a new micro-four-point-probe (mu 4PP) with sharp tips arranged in squire and spacing 20 mum. The mu 4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified mu 4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5 N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using mu 4PP.