Title :
Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors
Author :
Huang, H. ; Liu, Y. ; Hu, X.Z. ; Bush, M.B. ; Winchester, K.J. ; Musca, C.A. ; Dell, J.M. ; Faraone, L.
Author_Institution :
Sch. of Mech. Eng., Western Australia Univ., Crawley, WA
Abstract :
Tunable Fabry-Perot (FP) filters have been recently used in MEMS devices, such as adaptive infrared detectors. The mechanical characteristics of these filters are significantly influenced by the mechanical design of the structure, which eventually affects the filter performance and device integrity. This paper reports the mechanical design and optimization of FP filter structures by means of finite element modeling
Keywords :
finite element analysis; infrared detectors; micro-optics; micromechanical devices; optical design techniques; optical filters; photodetectors; Fabry-Perot MEMS; Fabry-Perot filters; MEMS devices; adaptive detectors; device integrity; filter performance; finite element analysis; infrared detectors; mechanical design; tunable MEMS; tunable filters; Biomembranes; Fabrication; Fabry-Perot; Finite element methods; Infrared detectors; Micromechanical devices; Mirrors; Optical filters; Optical tuning; Residual stresses; MEMSstructure; finite element analysis; mechanical design;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
0-7803-8820-8
DOI :
10.1109/COMMAD.2004.1577527
