Nanotexture Electrode on Nanoporous AAO Dielectric for Micro Tactile Sensing Devices

This study reports the integration of nano-texture electrode and self-assembly anodic aluminum oxide (AAO) dielectric layer on Si-substrate for capacitive-type micro tactile sensing devices. The advantages of these nano-structure micro devices are as follows, (1) employing AAO as dielectric film for its large dielectric constant (2.5-fold higher than oxide), and high electrical resistance; and (2) employing the AAO with nanoporous as template to form the nano-texture on metal electrode film to increase sensing area. Thus, the sensitivity of tactile sensor is increased. In application, the MOS (Au-AAO-Si) and the parallel-plate (Au-AAO-Ti) capacitors are fabricated on Si-substrate and then characterized. These two capacitors also show their capability as a tactile sensing device for tiny objects by detecting the contact of Drosophila and ant.