Title :
Batch Fabrication of Out-of-Plane, IC-Compatible, Nanoscale-Tip Silicon Neuroprobe Arrays
Author :
Goryu, A. ; Ikedo, A. ; Takei, K. ; Sawada, K. ; Kawano, T. ; Ishida, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi
Abstract :
We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length >10mum) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip angles ranging from 15deg to 50deg. The penetration capability of the nanoscale-tip microprobes was demonstrated, using finite element modeling (FEM) simulations and penetration tests with a gelatin as tissue/cell.
Keywords :
bioMEMS; cellular biophysics; etching; finite element analysis; gels; molecular biophysics; nanobiotechnology; neurophysiology; silicon; 3D silicon microprobe; FEM simulations; Si; batch fabrication; cell; finite element modeling; gelatin; multipoint nanoscale investigation; nanoscale tip silicon neuroprobe arrays; neuron; penetration tests; silicon wet etching; Coatings; Electrodes; Extracellular; Fabrication; Nanoscale devices; Neurons; Probes; Resists; Silicon; Wet etching;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805359
