A Thermoelectric Gas Sensor based on an Embedded Tin Oxide Catalyst for Detecting Hydrogen and NOx Gases

This paper reports a novel gas sensing method by using a thermoelectric device, thermopile in this case, with an embedded tin oxide catalyst. By using a thin catalyst film and gas adsorption process instead of absorption, the response time and recovery time were remarkably improved. And the fabricated sensor was characterized through detecting a hydrogen gas. Finally, NOx gas was successfully detected by using the proposed sensor. The respond and recovery time were shorter than 1 minute. The output signal change according to the concentrations of the NOx gas was 1.5times10^-1 mu V/ppm.