Frequency Drift Compensation in Mass-Sensitive Chemical Sensors based on Periodic Stiffness Modulation

Author

Demirci, K.S. ; Seo, J.H. ; Truax, S. ; Beardslee, L.A. ; Luzinova, Y. ; Mizaikoff, B. ; Brand, O.

Author_Institution

Sch. of Electr. and Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

284

Lastpage

287

Abstract

The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator´s quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during normal closed-loop sensor operation. This simultaneous measurement of Q-factor and frequency shift enables the compensation of frequency drift induced by environmental disturbances using the extracted Q-factor. The feasibility of drift compensation has been demonstrated by implementing the compensation scheme into a closed-loop chemical sensing system and performing gas-phase chemical measurements.

Keywords

Q-factor measurement; chemical sensors; frequency measurement; frequency modulation; microcavities; micromechanical resonators; microsensors; monitoring; Q-factor measurement; closed-loop chemical sensing system; frequency drift compensation; frequency measurement; gas-phase chemical measurement; mass-sensitive chemical microsensor; microresonator; monitoring; periodic stiffness modulation; Chemical sensors; Chemical technology; Feedback loop; Frequency measurement; Microcavities; Microsensors; Monitoring; Q factor; Resonance; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805374

Filename

4805374