A mixed gases measurement system based on thin film SAW sensor array and neural network

Author

Chen, Yuquan ; Li, Jun

Author_Institution

Dept. of Sci. Instrum., Zhejiang Univ., Hangzhou, China

Volume

1

fYear

1992

fDate

Oct. 29 1992-Nov. 1 1992

Firstpage

175

Lastpage

176

Abstract

A novel mixed gases (NO₂ and CO) measurement system with SAW gas sensor array and two - step signal processing method has been developed to improve the selectivity and precision of the mixed gases measurement. Functional materials, sensing film coating techniques, and optimum sensor design have been studied. Sensor array has been constructed and two-step signal processing with neural network is put forward to improve the general properties of the sensor system. Evaluation of the sensor system was undertaken and the results were promising. The precision of the measurement could be improved from 10% to 5% in the mixed gases concentration range of 0-100 ppM.

Keywords

coatings; computerised instrumentation; gas sensors; neural nets; surface acoustic wave sensors; surface acoustic wave signal processing; thin film sensors; SAW gas sensor array; film coating technique; mixed gas measurement system; neural network; thin film SAW sensor array; two-step signal processing; Generators; Radio frequency; Sensors; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1992 14th Annual International Conference of the IEEE

Conference_Location

Paris

Print_ISBN

0-7803-0785-2

Electronic_ISBN

0-7803-0816-6

Type

conf

DOI

10.1109/IEMBS.1992.5760913

Filename

5760913