Title :
A mixed gases measurement system based on thin film SAW sensor array and neural network
Author :
Chen, Yuquan ; Li, Jun
Author_Institution :
Dept. of Sci. Instrum., Zhejiang Univ., Hangzhou, China
fDate :
Oct. 29 1992-Nov. 1 1992
Abstract :
A novel mixed gases (NO2 and CO) measurement system with SAW gas sensor array and two - step signal processing method has been developed to improve the selectivity and precision of the mixed gases measurement. Functional materials, sensing film coating techniques, and optimum sensor design have been studied. Sensor array has been constructed and two-step signal processing with neural network is put forward to improve the general properties of the sensor system. Evaluation of the sensor system was undertaken and the results were promising. The precision of the measurement could be improved from 10% to 5% in the mixed gases concentration range of 0-100 ppM.
Keywords :
coatings; computerised instrumentation; gas sensors; neural nets; surface acoustic wave sensors; surface acoustic wave signal processing; thin film sensors; SAW gas sensor array; film coating technique; mixed gas measurement system; neural network; thin film SAW sensor array; two-step signal processing; Generators; Radio frequency; Sensors; Surface acoustic waves;
Conference_Titel :
Engineering in Medicine and Biology Society, 1992 14th Annual International Conference of the IEEE
Conference_Location :
Paris
Print_ISBN :
0-7803-0785-2
Electronic_ISBN :
0-7803-0816-6
DOI :
10.1109/IEMBS.1992.5760913
