Title :
EHD Micro Pump using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes
Author :
Wakui, Daisuke ; Imai, Naoki ; Nagaura, Yasuhiro ; Sato, Hironobu ; Sekiguchi, Tetsushi ; Konishi, Satoshi ; Shoji, Shuji ; Homma, Takayuki
Author_Institution :
Major in Nano-Sci. & Nano-Eng., Waseda Univ., Waseda
Abstract :
This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures. Low temperature SU-8 bonding method under 90degC was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23 Pa and 400 nL/min under applied voltage of 500 V.
Keywords :
electrohydrodynamics; micropumps; pyrolysis; SU-8 bonding method; SU-8 micro mesh structures; electro-hydrodynamic micro pump; fluorinert; pumping behavior; pyrolysis; pyrolyzed polymer 3D carbon mesh electrodes; voltage 500 V; wafer level carbon structure packaging; Biological materials; Electrodes; Fabrication; Micropumps; Polymers; Pumps; Temperature; Voltage; Wafer bonding; Wafer scale integration;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805428
